There are five recipes in the CRC Handbook of Metal Etchants (Eds. Walker
& Tarn). I bet your library has it.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Facts are stubborn, but statistics are more pliable."
   -- Mark Twain

On Wed, 17 Mar 2004, Shaurya Prakash wrote:

>
>
> Shaurya Prakash
> Graduate Research Assistant
> Department of Mechanical & Industrial Engineering
> University of Illinois at Urbana-Champaign
> Phone: (217) 265-0753
> Fax: (217) 244-6534
>
>
> Could someone suggest where I can find some information on wet etching of
> tantalum pentoxide (Ta2O5)? If someone has some experience in wet etching of
> Ta2O5 I would very much appreciate your insight in the matter.
>
> Thank you.
> - Shaurya.
>
>
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>
>