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MEMSnet Home: MEMS-Talk: apply method of the residual film stress of a cantilever beam by ansys simulation
apply method of the residual film stress of a cantilever beam by ansys simulation
2004-03-22
Si-Hyung Lee
apply method of the residual film stress of a cantilever beam by ansys simulation
Si-Hyung Lee
2004-03-22
Hi everybody,

I am trying to do ansys simulation of a multilayered cantilever beam and
trying to find the method of apply the residual stress gradient of each layer.
( for instant : biaxial stress of metal film = 1GPa compressive or 1GPa
tensile,...)
Can anybody please tell me how to do this.
Please tell me the steps.

Thanks,

sihyung




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