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MEMSnet Home: MEMS-Talk: Metals for ohmic contact on silicon
Metals for ohmic contact on silicon
2004-03-23
Heiko Pruessner
2004-03-23
MT Klaus Beschorner
Metals for ohmic contact on silicon
Heiko Pruessner
2004-03-23
Dear all,

has anyone experience on forming ohmic contacts on highly doped silicon with
metals other than aluminum?

Best regards,
Heiko Pruessner


Micromotive GmbH
Carl-Zeiss-Str. 18-20
55129 Mainz

Tel.: 06131/62780-10
Fax.: 06131/62780-15
[email protected]
www.micromotive-mikrotechnik.de



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