A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: electric connection
electric connection
2004-03-23
Cédricmargo
2004-03-24
David Nemeth
electric connection
Cédricmargo
2004-03-23
Hello,
I would like to know if it is possible to make vias for electrical
connections in glass plates. More precisly, I want to bond two glass
wafers, on one side(the side which must be bonded)  of each wafer ,
there would be electrodes and interconnections (gold or platinium)
processed by lifft-off. After the glass wafers are bonded, my problem is
to make electrical connections to the outside world.For that, is it
possible to make metals vias through the glass plates to be connected
with macroscopic wires or do you know other kinds of methods to do that?

All the suggestions would be interesting for me because I am not well
familiar yet with microfabrication processes.
Thanks .

-- --
Cédric Margo - cedric.margo@lien.uhp-nancy.fr
Laboratoire d'Instrumentation Electronique de Nancy
Faculté des Sciences et Techniques
Boulevard des Aiguillettes - BP 239
54506 Vandoeuvre les Nancy - FRANCE
Tel:03 83 68 41 56
fax:03 83 68 41 53
http://www.lien.uhp-nancy.fr




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
University Wafer
MEMS Technology Review
Harrick Plasma, Inc.