A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Polymer deposition???
Polymer deposition???
2004-03-23
Nagarajan
2004-03-24
Monica Rege
2004-03-24
Brubaker Chad
Polymer deposition???
Nagarajan
2004-03-23
Dear all,

Iam nagarajan, doing Masters in mechanical Engg in concordia univ, montreal. Iam
in the process of developing a fabrication process for a piezoelectric tactile
sensor.

 The sensor design is like this....

It consists of a PVDF material embedded between two silicon layers. There are
two cylinders over the substrate, one surrounding the other. The inner cylinder
is made of a rigid material and the outer one of a soft material. Iam planning
to use polysilicon for the inner cylinder and a polymer for(PMMA,polyimide) the
outer one.

Has anyone previously tried polymer deposition and patterning it to cylindrical
shape.Can anyone help me in this regard to how can a polymer be deposited and
patterend into cylindrical form, with the inner cylinder being a polysilicon.

Thanking you all in advance,

Regards




NAGARAJAN N.B
1845,de MAISSONNEUVE WEST
APARTMENT NO 21
MONTREAL,QUEBEC
CANADA - H3H1J9
PH NO- 001-514-937 8454

Do you Yahoo!?
Yahoo! Finance Tax Center - File online. File on time.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
University Wafer
MEMStaff Inc.
Mentor Graphics Corporation