Hi Klaus,

    Do these metals require any kind of annealing treatments, and if so what
are they for Ti, W, and Pt?

Thanks,

Masa




> Message: 7
> Date: Tue, 23 Mar 2004 23:50:57 +0100
> From: MT Klaus Beschorner 
> Subject: [mems-talk] Metals for ohmic contact on silicon
> To: [email protected]
> Message-ID: <[email protected]>
> Content-Type: text/plain; charset=us-ascii; format=flowed
>
>  >has anyone experience on forming ohmic contacts on highly doped silicon
>  >with metals other than aluminum?
>
>
> Titanium, Tungsten, Tungsten-Titanium and their nitrides and silicides,
> Platinum, Cobalt, Nickel
>
> all are relatively common in the semiconductor industry.
> best regards,
> klaus
> --
> Klaus Beschorner
> Metron Technology Europe, PVD (Eclipse) Process Manager
> Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683