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MEMSnet Home: MEMS-Talk: Literature on Reaction rates of HNA-Si etching
Literature on Reaction rates of HNA-Si etching
2004-03-25
Srikanth Gopal
2004-03-29
Ashwin
Literature on Reaction rates of HNA-Si etching
Srikanth Gopal
2004-03-25
Hi all ,

I am trying to find literature on parameters likes reaction rate const. and
diffusion rate constant involving the chemistry between HNA (HF,HNO3,H2O) and
Silicon. If anyone has any references regarding the above it would help me.

Thanks ,
Srikanth.

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