A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: Gold diffusion barrier
Re: Gold diffusion barrier
2004-03-25
Marc Straub
Re: Gold diffusion barrier
Marc Straub
2004-03-25
Bill,

Try platinum (you may want to use titanium and/or chrome as
adhesion layers first).

marc

--
Marc Straub
Sr. Engineer, Solidus Technologies, Inc.
Colorado Springs, CO

---------------------------------------
On Tue Mar 2 15:43:47 EST 2004 William Lanford-Crick wrote:

Hi group,
I need a conductive barrier metal to prevent Gold from
diffusing into ohmic metal after 850deg C annealing.

50 nm Moly is OK.  Surface morphology is still somewhat
rough after annealing.  Any ideas of what might be better?
-Bill






reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
University Wafer
Nano-Master, Inc.
Tanner EDA by Mentor Graphics