I would like to learn more about this, because gold likes to spit more
than any other metal that I have evaporated. At least you are
programming your soak power and deposition power. I still set up those
manually, changing power depending on what is new in the pocket.

Looking directly at the source (gold melt) through a filtered viewport,
I cannot see spitting of the metal. It is only after I drop my view to
see only above the source, that I can see little fire balls of molten
gold launching from the source. I drop the power until I no longer see
this effect. Deposition rate is somewhere between 2 to 5A/s.

If you have pole extensions on your gun, try spreading your beam
density. A high density beam (small spot) has always been trouble for
me.

I don't use sweep for gold.

Throw distance: Are your substrates far enough away from the source that
the spit does not reach your substrates?

Good luck!

Jeff


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf
Of J W
Sent: Wednesday, March 17, 2004 9:33 PM
To: [email protected]
Subject: [mems-talk] Metal Spitting

Hi,

I'm trying to deposit gold using Ebeam evaporation,
but kept having metal spitting problems.  I tried to
change the equipment running conditions like longer
soak time, soak power close to deposition power,
altering beam sweeping pattern.  Sometime it improves
and other time it doesn't.  Are there any other
factors that needs to be considered to get rid of the
spitting?

Thanks!
J.W.

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