Hey Srikanth,

One of the papers you can look up is "Etch rates for Micromachining
Processes". The authors are Kirt Wlliams and Richard Muller. Journal of
MEMS Vol 5,No.4, Dec 1996.

I hope it is useful.

Best regards
Ashwin

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf
Of Srikanth Gopal
Sent: Wednesday, March 24, 2004 5:17 PM
To: [email protected]
Subject: [mems-talk] Literature on Reaction rates of HNA-Si etching

Hi all ,

I am trying to find literature on parameters likes reaction rate const.
and diffusion rate constant involving the chemistry between HNA
(HF,HNO3,H2O) and Silicon. If anyone has any references regarding the
above it would help me.

Thanks ,
Srikanth.

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