Patrick, one thing you might consider if your substrate size is rather
consistant, that is to bury the substrate in the chuck so that the spinning
object is now the chuck rather than the substrate.  You would have to clean
the chuck after every application, but it doesn't sound like that should be
much a problem for you. Your chip would have to fit nicely in the cavity
and the cavity should be as deep as the chip is thick.   Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Patrick Poissant [SMTP:[email protected]]
Sent:   Monday, March 29, 2004 8:12 PM
To:     [email protected]
Subject:        [mems-talk] SU8 spin-coating

Hello,

I have small samples (1cm square) and try to spin-coat SU8 resist on it. I
apply my ressit with a pipette directly on the samples and then spin-coat.
I
also try to spin slowly when appling the resist. These two ways produce big
edge bead. How do you spin-coat SU8? How big are your samples?

Best regards,

Patrick Poissant
___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Universite de Sherbrooke
   Sherbrooke (Quebec) J1K 2R1
   CANADA
   [email protected]
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new -
Albert
Einstein



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