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MEMSnet Home: MEMS-Talk: KOH Etching Concentration
KOH Etching Concentration
2004-03-30
Liwei Wang
2004-03-31
Michael L
KOH Etching Concentration
Liwei Wang
2004-03-30
Dear all:

I have this question in my mind for a while. we all know that in KOH
etching, the pyramid formation will be reduced by adding certain amount
of IPA solution. However, the volume ratio of IPA varies from 1% volume
to 25% volume suggested by people in this forum. my concern will be if
this amount of IPA will be considered in the calculation of the etchant
concentration, or we just exclude it due to it's poor solubility in the
etchant.


Thank you so much in advance.


Ivy



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