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MEMSnet Home: MEMS-Talk: Etching resistance tape
Etching resistance tape
2004-03-31
mikoyan
Etching resistance tape
mikoyan
2004-03-31
Hello,
I'm looking for a tape that could provide a good resistance to wet chemical
etching with excellent adhesion to wafer surface. I may use it to protect the
unpolished side of wafer in KOH etching at a temperature below 120C.
Appreciate it.
Sincerely
mikoyan
reply
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