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MEMSnet Home: MEMS-Talk: KOH Etching Concentration
KOH Etching Concentration
2004-03-30
Liwei Wang
2004-03-31
Michael L
KOH Etching Concentration
Michael L
2004-03-31
I would like to add to this point: how much IPA is actually left in heated
KOH solution after the duration of an etch??



>
>Dear all:
>
>I have this question in my mind for a while. we all know that in KOH
>etching, the pyramid formation will be reduced by adding certain amount
>of IPA solution. However, the volume ratio of IPA varies from 1% volume
>to 25% volume suggested by people in this forum. my concern will be if
>this amount of IPA will be considered in the calculation of the etchant
>concentration, or we just exclude it due to it's poor solubility in the
>etchant.
>
>
>Thank you so much in advance.
>
>
>Ivy
>
>
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