Patrick,

I think your sample size might be two small for SU-8.  Squares are also
a pain.  I was doing 1 inch squares and eventually switched to 2 inch
wafers because of the edge bead problem.

If you have a round substrate, you can spin the SU-8, soft-bake it, and
then put it back on the spinner and use a syringe filled with Acetone to
remove the edge bead.  That was my solution, and it worked.  I think it
would be hard to implement with square samples of any size and
impossible with 1 cm ones though.

Greg
Boston University

-----Original Message-----
From: mems-talk-bounces+gjreiman=bu.edu@memsnet.org
[mailto:mems-talk-bounces+gjreiman=bu.edu@memsnet.org] On Behalf Of
Patrick Poissant
Sent: Monday, March 29, 2004 8:12 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] SU8 spin-coating

Hello,

I have small samples (1cm square) and try to spin-coat SU8 resist on it.
I
apply my ressit with a pipette directly on the samples and then
spin-coat. I
also try to spin slowly when appling the resist. These two ways produce
big
edge bead. How do you spin-coat SU8? How big are your samples?

Best regards,

Patrick Poissant
___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K 2R1
   CANADA
   patrick.poissant@usherbrooke.ca
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new -
Albert
Einstein



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