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MEMSnet Home: MEMS-Talk: BHF recipe and time
BHF recipe and time
2004-04-02
Monica Rege
BHF recipe and time
Monica Rege
2004-04-02
Hi everyone

I am looking for a BHF recipe for a partially released mems chip

1. exact concentration of the buffer solution (HF acid %= ? Water %= ?)

2. Time the chip is processed with BHF

3. Details of method and precautions I can take to prevent damage

Thanks

Monica

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