Hi Tomi,

I am wondering what kind of base pressure you have in the system. One of the
possible reasons for dark color is non-stochiometric Aluminum oxide/nitride.
Other than that Aluminum sputtering should be straight forward. If you need
any further information please let me know. I hope this helps.

Thanks
Ravi
Hionix, Inc.
www.hionix.com


-----Original Message-----
From: Tomi Meilahti [mailto:tomi.meilahti@metorex.fi]
Sent: Monday, April 05, 2004 5:33 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Problem with aluminium sputtering

Hi everybody,
We recently purchased an aluminium target for the companys rather old
Leybold-Heraeus (model Z 400 I think) sputtering system. The problem is I
can´t find working sputtering parameters for it. Either there is no
aluminium coating on the test wafer at all or then the coating is of very
dark colour. The process looks OK when I look through the small windows on
the chamber walls. I´ve tried varying sputtering pressure and voltage. Any
ideas or suggestions would be greatly appreciated.
Best regards
Tomi Meilahti
Metorex International Oy
Nihtisillankuja 5
02631 Espoo
Puh: 09 32941316
Fax: 09 32941301
E-mail: tomi.meilahti@metorex.fi

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