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MEMSnet Home: MEMS-Talk: Re: what am i doing wrong with ti adhesion layers?
Re: what am i doing wrong with ti adhesion layers?
1998-11-10
Li Zhihong
1998-11-09
Scott D. Collins
1998-11-09
TK Wang
1998-11-18
R.B. Marcus
Re: what am i doing wrong with ti adhesion layers?
Li Zhihong
1998-11-10
May be you can try to use thinker Ti layer and sputtered Au.

At 98/10/20 09:22:00 AM, you wrote:
>What am i doing wrong with Ti adhesion layers?  I am thermally
>evaporating 50-100nm Au films on glass substrates with 2-5nm Ti
adhesion
>layers.  After a few days, the films turn from reflective Au to
a frosty
>white color.  Is this titanium oxidation or some other diffusion
process
>I am unfamiliar with?
>
>Thanks
>
>L. Andrew Lyon, Assistant Professor
>School of Chemistry and Biochemistry
>Georgia Institute of Technology
>Atlanta, GA  30332
>
>andrew.lyon@chemistry.gatech.edu
>
>
>
______________________________________
Zhihong Li,
Institute of Microelectronics, Peking University
Beijing 100871, China


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