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MEMSnet Home: MEMS-Talk: metals search
SU8 spin-coating
2004-03-30
Patrick Poissant
2004-03-30
Christopher Blanford
2004-03-31
Greg Reimann
2004-03-30
Brubaker Chad
2004-03-30
Patrick Poissant
metals search
2004-04-06
Patrick Poissant
2004-04-07
Brent Garber (2 parts)
2004-04-08
David Nemeth
2004-03-30
Gary
metals search
David Nemeth
2004-04-08
Oddly, I've seen an Iodide based etch aggressively undercut thick
electroplated nickel that was sandwhiched between two gold layers.  It was a
very dramatic effect.  The etchant did not affect the bare nickel.  It must
have been some sort of electrochemical effect, but I never figured it out.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA -----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of Brent Garber
Sent: Wednesday, April 07, 2004 10:41 AM
To: General MEMS discussion
Subject: Re: [mems-talk] metals search


Patrick,

Gold sticks well to nickel and an iodine Au etch doesn't attack Ni.

Brent

Patrick Poissant wrote:

> Hello,
>
> I want first thank all of you who help me with the SU8 spin-coat.
>
> I'm searching for a metal that I can etch without etching electroplated
nickel.
> This metal will be evaported on photo resist and should not crack.
>
> Best regards,
>
> Patrick Poissant
> ___________________________________________________
>    M.A.Sc. Student
>    Dept. of Electrical Engineering
>    Université de Sherbrooke
>    Sherbrooke (Québec) J1K 2R1
>    CANADA
>    [email protected]
>    Sherbrooke Microelectronics Research Group
>    www.gel.usherb.ca/gms
>
>    Anyone who has never made a mistake has never tried anything new -
Albert
> Einstein
>
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