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MEMSnet Home: MEMS-Talk: Does KOH or TMAH attack Cu ?
Does KOH or TMAH attack Cu ?
2004-04-29
Tan, Chuan Seng
2004-04-29
Kirt Williams
Does KOH or TMAH attack Cu ?
Tan, Chuan Seng
2004-04-29
Hello !

Does anyone know if Si etchants like TMAH or KOH attack Cu ? If they do, at what
rate ?

MANY THANKS !!

CSTan
reply
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