Michael,

The primary method I have seen for tapering SU-8 is through the use of a gray
scale mask.   Basically, this is a mask where, instead of just having regions of
full transparency or full reflection (i.e., glass and chrome), you have areas
with variable transpanrancy.

My understanding is that, with SU-8, this may need to be performed on a glass
substrate through the backside of the wafer, since SU-8 is negative tone, and
exposing from the top may create a reversed profile.

Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   [email protected] [mailto:mems-talk-
[email protected]]  On Behalf Of Michael L
Sent:   Thursday, April 29, 2004 5:07 AM
To:     [email protected]
Subject:        [mems-talk] Tapering SU-8 in z-axis

Hello,

Does anyone know of a simple method for vertically tapering SU-8? I have
heard of people who have achieved this, but haven't seen anything mentioned
in the literature.

Regards,

Michael

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