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MEMSnet Home: MEMS-Talk: Solvent for complete removal of photoresist MEGAPOSIT SPR 955 CM Series
Solvent for complete removal of photoresist MEGAPOSIT SPR 955 CM Series
2004-05-03
Parijat Bhatnagar
Solvent for complete removal of photoresist MEGAPOSIT SPR 955 CM Series
Parijat Bhatnagar
2004-05-03
Can anybody suggest me a solvent for complete and effective removal of hard
baked, plasma treated photoresist "MEGAPOSIT SPR 955 CM Series" but still
leaving the HMDS primer monolayer intact on the Silicon Oxide surface. I
tried Acetone with Ultrasonic treatment for 5 minutes but it still left 10
nm of resist layer.

Sincerely,
Pari.



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