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MEMSnet Home: MEMS-Talk: dicing PZT
dicing PZT
2004-05-04
Serhan ARDANUC
2004-05-04
newman
dicing PZT
Serhan ARDANUC
2004-05-04
Hi All,

For an ultrasonic transducer I need to dice 0.5mm thick PZT plates. We have
K-S 7100 dicing saw.
I used to partially cut PZT (less than 0.5mm) using basically a silicon
blade (S1235) at 0.5 inch/sec cutting speed, smoothly without any problem.
Now I am trying to cut all the way through PZT bonded on a silicon die
(using super glue). So I am after slightly cutting into silicon.  The
problem, however is that diced PZT pieces do not remain intact, and gets
detached from silicon.
The problem I think is mostly due to weakness of the bond between PZT and
silicon.

On the other hand, I am still wondering if I am cutting too fast and
shearing the pieces more than enough. I appreciate if anyone can share
his/her experience on this issue or recommend me a suitable dicing recipe
(blade type, cutting speed and RPM speed of the blade) for PZT?

Thanks

Serhan Ardanuc
Cornell University

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