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MEMSnet Home: MEMS-Talk: silicon nitride
silicon nitride
2004-05-10
Greg Miller
silicon nitride
Greg Miller
2004-05-10
I am looking for a company that can sputter or reactively sputter a dielectric
material possible (silicon nitride film) at temp. below a 100 C and with a
refractive index of ~2.2 at 820-nm.
If you could respond directly to me at         [email protected]

Thanks,

Greg Miller
KVH Industries
8412 W 185th Street
Tinley Park, IL 60477
Ph: 708-444-3837
Fax: 708-444-2801
Email: [email protected]



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