I think you will always have pin-hole issues with PECVD, but if your die
are small you may endup with a few pin-hole free devices. For pin-hole
free film you will need to switch to LPCVD.

-Mike

>>> schinaldo@tiscali.it 5/10/2004 5:50:07 AM >>>
Hi,

how can I get a DUAL-FREQUENCY, water-proof & low stress silicon
nitride in P.E.C.V.D.?
Cordially
Aldo
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