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MEMSnet Home: MEMS-Talk: Selective Etch - oxide/bpsg
Selective Etch - oxide/bpsg
2004-05-10
Avi Laker
2004-05-10
vijay j
Selective Etch - oxide/bpsg
vijay j
2004-05-10
hello,
       HF wiil be solution for your problem

byeee

Avi Laker  wrote:

Anyone have or recall an etchant that can selectively etch thermal oxide faster
then softer glasses such as BPSG? I recall using one may years ago wrt to a
reflow
process.

al

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