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MEMSnet Home: MEMS-Talk: Silicon behaviour after etching
Silicon behaviour after etching
2004-05-11
Arti Tibrewala
Silicon behaviour after etching
Arti Tibrewala
2004-05-11
Hi Everybody, I have a Si sample (n antimony). I coated this sample with Gold/Cr
on both sides, kept it on brass and injected current and noted the change in
voltage. I-V characterstic is linear, plus it doesn't matter when I pass current
from top to bottom or reverse. Now, I process this sample, form a boss membrane
on it, cover it with oxide everywhere except 4 resistors (L-1000mm and W-500mm).
These resistors are placed very near to  boss. I coat back side with metal and
cover all the four resistors with metal on the front side. I repeat the same
procedure of injecting current and measuring voltage. This time, value of
voltage is different when I inject current from top to bottom and bottom to top.
I fail to understand why the value of voltage should change. Its a simple
resistor like structure. Does etching of Si some how effects???  If anybody has
any experience with this please help me.
Thanks a lot!!
Arti
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