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MEMSnet Home: MEMS-Talk: SU8 Adhesion to Si
SU8 Adhesion to Si
2004-05-13
Gabriel Dagani
SU8 Adhesion to Si
Gabriel Dagani
2004-05-13
I am working on a process which involves multiple layers of
photolithography. After the first bake, I have problems with
the adhesion of the SU8 to the silicon. I heard that
microchem has a adhesion promoter... is there any other way?

 thanks - Gabe


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