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MEMSnet Home: MEMS-Talk: As, Sb additives for smooth surface with aq. KOH etch
As, Sb additives for smooth surface with aq. KOH etch
2004-05-16
Arthur Beyder
As, Sb additives for smooth surface with aq. KOH etch
Arthur Beyder
2004-05-16
Does anyone have any information about the use of As (arsenic) or Sb
(antimony) as additives for aqueous KOH etch?  I've dug up a publication
(Mihalcea et al., 2001) that suggests that these additives dramatically
smooth KOH etched Si surface.  I am interested to find out whether
anyone has used this technique, how much to add, at what point of the
etch, and whether the effects are truly as dramatic as the paper suggests.

Thank you,
Arthur Beyder
SUNY at Buffalo
Department of Physiology and Biophysics


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