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MEMSnet Home: MEMS-Talk: BCB like resist with low curing temperature
BCB like resist with low curing temperature
2004-05-18
Olivier Boulle
2004-05-24
Olivier Boulle
BCB like resist with low curing temperature
Olivier Boulle
2004-05-18
Hi,
I am looking for a resist with good planarization properties, low
thermal expansion (CTE), high resistivity,  good adherence of metals
(like BCB) but with  low curing temperature ( typically T<150°). Please
let me know if you heard about such a resist.
Thanks!
Best regards,
Olivier Boulle



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