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MEMSnet Home: MEMS-Talk: etching Silicon, but not Al2O3
etching Silicon, but not Al2O3
2004-05-19
Wenjun Yun
etching Silicon, but not Al2O3
Wenjun Yun
2004-05-19
Hi,

       Does anyone know any chemical can etch silicon but not attack AL2O3?

       Thanks.

       Wenjun

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