Hi:
Does anyone have experience with cv curve measurement for MSQ film? I have
wafers are Si substrate, 4000 A MSQ film (spin on) and need to measure the
cv curve with HP 4284A (-40----40V, 1MHz). But the result always have a
negative shift and cannot show a stable accumulation region. But due to
thermal stability MSQ cannot anneal on temperature over 425C.

I'm wondering if anyone has done this before and can give me some advice? I
highly appreciate your help.

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