Hi everyone,

I am trying to prepare a recipe for etching Silicon <100>. I have no idea
right now,and I am a beginner in this field.
I need to have make a V-groove in Silicon wafer(Substrate)and I was
wondering can any one of you answer these questions:

1) Which oxidizing agent is best suited to produce smooth surface with
reduced hillocks ?
2)what amount of the oxidizing agent do I need to add to the 30% KOH
solution?

The recipe which I have right now is
70 g KOH pellets
190 ml DI water
40 ml isopropyl alcohol

Thanks,
Dhanamjaya Reddy Guda
Louisiana State University,
Phone: (225) 578-4412
Fax: (225) 578-9195