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MEMSnet Home: MEMS-Talk: Need help in Bonding
Need help in Bonding
2004-06-02
dpkgp
2004-06-02
BRIAN DOUGLAS
2004-06-02
Dipankar Ghosh
2004-06-02
Hell, Erwin
2004-06-02
Brubaker Chad
Need help in Bonding
dpkgp
2004-06-02
 Dear Sir/Madam,

        I am febricating an Accelerometer.I have two part one is cantilever with
tip and other is Base electrode assembly.I have to bond ,two parts. Could you
please tell me the best bonding method between gold layer(1000A)and SiO2
layer(0.8 um).

Thanks & Regards

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