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MEMSnet Home: MEMS-Talk: polysilicon electric and thermal properties
polysilicon electric and thermal properties
2004-06-03
Victor
polysilicon electric and thermal properties
Victor
2004-06-03
Hi, everyone,

    Where can I find the resistivity, thermal conductivity and specific heat of
polysilicon in the condition of different doping dosage and temperature?
    Thank you.

Gang ZHAO
reply
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