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MEMSnet Home: MEMS-Talk: TaAl etchant
TaAl etchant
1998-11-26
Dong-Sik Shim
TaAl etchant
Dong-Sik Shim
1998-11-26
hello

I am trying to find the etchant of TaAl. Now I use lift-off method to
pattern the TaAl.
It's a diifficult job and  has cleaning problems.
I am very glad if you recommend the etchant of TaAl.




E-mail : [email protected]

Domestic
 Tel    : 0331-200-8748
          011-289-1598
 Fax    : 0331-200-3307

Foreign
 Dong-Sik Shim
 SAMSUNG ELECTRONIC CO., LTD
 416,Maetan-3Dong, Paldal-Gu,
 Suwon city, Kyungki-Do, Korea  442-742
 Tel    :82-331-200-8748
 Fax    :82-331-200-3307

[Moderator's note: I excised four lines after "Domestic", above,
because they contained non-ASCII characters that were incompatible
with the Content-type: of the message as I received it, and which
caused some difficulty with my mail reader.  CMR]


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