Dear all

I am going to fabricate SAW filter using a piezoelectric substrate, AlN
in my case.
As far as I know, there are several wet etchants and dry etching
methods.
Can anyone let me know a wet or a dry etching method and condition of
AlN?

Thank you


Sincerely
Yong-Ho Kim

===========================================
Yong-Ho Kim
Ph.D. Candidate
Microsystems Lab. (  http://mems.yonsei.ac.kr)
Dept. Mechanical Engineering
Yonsei University
Seoul, Korea

Tel) 82-2-2123-2844
C.P) 82-16-9288-5157
Fax) 82-2-312-2159

===========================================