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MEMSnet Home: MEMS-Talk: How to make an SEM sample?
How to make an SEM sample?
2004-06-09
Josef Kouba
2004-06-09
Jon Hiller
2004-06-11
Josef Kouba
2004-06-11
Isaac Wing Tak Chan
2004-06-09
Campe, Steve
2004-06-10
Tripp, Marie Kathleen
2004-06-11
Josef Kouba
2004-06-11
Mac McReynolds
2004-06-11
Borski, Justin
How to make an SEM sample?
Tripp, Marie Kathleen
2004-06-10
Hi Josef,

I like to use a saw to pre-scribe wafers which I want to break later on.  I use
a normal dicing saw but only cut partially through the wafer on the backside.
Then do my normal spinning, etc. for photo-litho.  When I want to break the
wafer later on the fracture lines are already defined.  I like this technique
because all of the mess and heat of dicing is done with before any of the photo-
litho.

Cheers,  Marie




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