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MEMSnet Home: MEMS-Talk: SU-8 adhesion to glass substrate
SU-8 adhesion to glass substrate
2004-06-15
annuar
2004-06-16
Cheng Ming Lin
2004-06-16
Patrick Poissant
2004-06-15
Brubaker Chad
2004-06-17
X Chen
2004-06-18
Peter Svasek
2004-06-18
Michael L
SU-8 adhesion to glass substrate
annuar
2004-06-15
Hi everyone.
I'm having problem coating my glass slide with SU-8 resist. It seems that
the SU-8 does not adhere very well to glass. After developing, some part of
my patterns are lifted off. Does anyone know how to solve this problem? Does
the softbake or PEB have anything to do with this? Thanks.

Abang Annuar




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