Hello Shigc:

      The book by Madou is very comprehensive
       "Fundamentals of Microfabrication", M.J. Madou, CRC Press,
September 1997.

      You can go to
http://www-s2k.arc.nasa.gov/mems/mono.html
to find more books and info.




Yi-Kuen Lee

PhD student
Department of Mechanical and Aerospace Engineering
School of Engineering and Applied Science
University of California, Los Angeles

phone # (O) 310-825-1350  310-825-9540  310-825-8275
        (H) 310-267-7521  310-541-8834
fax   #     310-825-1350
email address = [email protected]

On Sat, 28 Feb 1998, shigc wrote:

> Dear colleges,
> I am searching a book about MEMS technology.I want it to be a text book for
> beginners.
> Thanks for any help!
>
> sincerely
> Dasse
> [email protected]
>
>