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MEMSnet Home: MEMS-Talk: wafer holder
wafer holder
2004-06-16
tsaokai@umich.edu
wafer holder
tsaokai@umich.edu
2004-06-16
Hi to all,

We are currently looking for a small wafer holder. Our wafer sample is 1cm*1cm.
The wafer holder has to meet all these criteria:

1. withstand at least 450C in nitrogen
2. thermally conductive
3. exerts uniform pressure
4. small enough to fit in a 5"*6"*4" muffle furnace
5. non-reactive material

Thanks,

Kai Tsao


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