Dear MEMS enthusiasts,

Has anyone laser drilled holes on a 50-100
micrometer thick silicon membrane, to get a roughly
cylindrical cavity. I need holes of diameter of
about 50 micrometers on a Silicon membrane of the
above mentioned thickness. If anyone knows of any
publications in this area or can offer any advice or
tips, I would much appreciate if you could send them
to me.

Thanks in advance,

Kirthi Roberts

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Kirthi Roberts
School of Engineering Science
Simon Fraser University
Vancouver,
Canada
e-mail : [email protected]