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MEMSnet Home: MEMS-Talk: OTS coating
OTS coating
2004-06-23
Suyong Jung
2004-06-24
Christopher Blanford
OTS coating
Suyong Jung
2004-06-23
Hello, all

I would like to coat OTS monolayer onto silicon dioxide surface.
What I have tried so far was to make diluted OTS solution with toluene or
methanol first.
After that, intensively cleaned silicon dioxide chips were transferred to
the solution and hold in it for 5 to 30 minutes.
However, images from AFM showed lots of small dots that were not shown
before OTS coating.
I rinsed the chips with fresh toluene or methanol after taking out from the
solution, even cleaned in ultra sonication bath.
It looked like to improve a little bit, but that was not enough for my purpose.

Is there any possible way to improve the quality of OTS coating?

Thanks to all in advance.

Suyong




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