A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: anodic bonding with nitride on silicon wafer
anodic bonding with nitride on silicon wafer
2004-06-25
Rahul Agarwal
2004-06-25
Shile
PZT 52/48
2004-06-27
Vikas Nair
2004-06-25
Jason Viotty
2004-06-25
Brubaker Chad
anodic bonding with nitride on silicon wafer
Rahul Agarwal
2004-06-25
Hello everyone,
I wanted to know if any of you has any experience in doing anodic bonding
of
a n-type wafer with 1000A thick nitride (LPCVD), to a pyrex glass
wafer. All the suggestions will be highly appreciated.
Thanks
Rahul agarwal



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.
Nano-Master, Inc.