Hello

We did 2.3 microns with SU8 2015:thinner 50:50 mass

Patrick Poissant

___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K  2R1
   CANADA
   patrick.poissant@usherbrooke.ca
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new - Albert
Einstein



----- Original Message -----
From: "Yeswanth Rao" 
To: 
Sent: Thursday, June 24, 2004 12:00 PM
Subject: [mems-talk] SU 8 Photoresist


> I would like to use SU 8 photoresist to get a uniform coating of 1.7
> micron on Si and Si/Cr. I have SU-8 2025 photoresist and SU 8 thinner.
> Would it be possible to use this thinner to reduce the viscosity of the
> 2025 resist to get down to 1.7 micron thickness? If that is possible,
> would anyone be able to able to guide me as to what should be ratio of
> this mixture to achieve this thickness. Thanks in advance