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MEMSnet Home: MEMS-Talk: Self made PECVD
Self made PECVD
2004-06-30
Nuutti Matintupa
Self made PECVD
Nuutti Matintupa
2004-06-30
Hello everyone!

If somebody has experience in building a PECVD or plasma chamber for
another purpose, I would be extremely happy for your help. I have built a
small apparatus which works in principle, but without help I'm soon having
hard time while trying to find the right parameters. My goal is to use it
at least for plasma cleaning and oxidizing.

Thank you in advance
Nuutti Matintupa


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