A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU-8 Removal
Plasma etching of thin PDMS layer
2004-07-04
[email protected]
2004-07-04
Z.,W.Y.(Lydia)
SU-8 Removal
2004-07-04
Tingrui Pan
2004-07-05
Edward Blackwell
2004-07-06
Greg Reimann
SU-8 Removal
Tingrui Pan
2004-07-04
Dear Colleagues,

Does anyone have any experience on removing SU-8 layer after
photolithography (with or without hard bake)? I need to use SU-8 as a mold
to do electroplating and SU-8 should be removed eventually. Thank you very
much for any of your suggestion,

-----------------------------------------------
Tingrui Pan
Ph.D. Candidate
Electrical Engineering
University of Minnesota
Phone:   612-626-7188 (Lab)
         612-624-5034 (Office)
Website: www.ece.umn.edu/groups/umbmlab
-----------------------------------------------



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Tanner EDA by Mentor Graphics
Addison Engineering
Process Variations in Microsystems Manufacturing