Dear MEMS-talk subscribers,

The very useful SU-8 site
http://aveclafaux.freeservers.com/SU-8.html
quoted the paper by Guerin

L. Guerin, M. Bossel, M. Demierre, S. Calmes, and P.
Renaud, "Simple and low cost fabrication of embedded
microchannels by using a new thick-film photoplastic", in
Proc. Transducers 1997, Chicago, (1997) : 1419-1422

that the polymer shrinkage of SU-8 is 7.5%. I have
searched for weeks to get hold of the paper or more
details on the polymer shrinkage but in vain. I was
wondering if any subscribers have an electronic copy of
it. or any information/details on the polymer shrinkage
(e.g. how the shrinkage was measured, sample size, etc).
Any information on SU-8 polymer shrinkage is greatly
appreciated. Many thanks!

Your advise and assistance is greatly appreciated.
suitto



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