Hi all,

I am looking for a way to dice my silicon wafer with deep etched pockets with a
micron thick 8 mm by 8 mm silicon nitride membrane on one side. I tried to use
the wax to fill in the cavities and dice. But, I observed the membranes break.
Our dicing saw uses a high pressure water stream to cool the diamond blade. I
would appreciate if anyone has any suggestions.

Thanks in advance,
-Mahavir Sanghavi