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MEMSnet Home: MEMS-Talk: Sticking problem of evaporated copper on titanium
Sticking problem of evaporated copper on titanium
2004-07-06
Patrick Poissant
2004-07-12
Kirt Williams
Sticking problem of evaporated copper on titanium
Patrick Poissant
2004-07-06
Hello,

I have sticking problems of my evaporated copper on evaporated titanium. Does
someone had the same problem? solutions? Is it because of the titanium oxide?
How can I remove it if so? Is the adhésion of copper on chromium better?

Best regards,

Patrick Poissant

___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K  2R1
   CANADA
   [email protected]
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new - Albert
Einstein


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